Wide Plasma Surface Processor Surface Activation Treatment
1. Outline
SPK-500S Wide Plasma Cleaning Machine(Plasma cleaner), the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion. Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.
2. Product feature
1. A dielectric is placed between the metal electrodes, and a uniform electric field is formed and a plasma is generated by taking advantage of the polarization phenomenon on the surface of the dielectric.
2. It can form plasma on a large scale and can be used with automatic pipeline;
3. More reliable power amplifier and dc module, using automatic vacuum capacitor matcher to provide long-term stable process time guarantee;
4. Suitable for mass production of large size products;
5. Low treatment temperature, conventional treatment temperature < 40ºC
3. Industry application
1. Display industry: TP fitting, panel surface activation, surface cleaning before ITO coating;
2. Glass cover industry: AF coating pretreatment, AF/AS overflow plating removal, ink printing;
3. Semiconductor: integrated package bonding, Wire bond pretreatment, ceramic packaging, BGA/LED surface activation;
4. Circuit board: FPC/PCB organic cleaning and surface activation;
5. Plastic industry: surface modification, surface coarsening.
4. Specification of equipment
Broad plasma host |
| Specification of the machine | L1800×W1107×H1408mm |
| Weight | 280Kg |
Requirements planning | AC 220V/50Hz single phase 2.5KW |
| Plasma generator specification |
| POWER | 0-600W adjustable |
| Mains frequency | 13.56MHz |
| Matcher |
Fully automatic vacuum capacitor matching unit
|
| Plasma gun head specification |
| Treatment process | 800mm |
| Spear head size | L570*W90*H74mm |
| Weight | 10Kg |
The gun head is adjustable in height
| 0-10mm(regulation precision ±0.3) |
Common processing height
|
From 1 to 5 mm or less
|
Cooling range of gun head
| 25-35ºC |
| Process gas |
| The use of gas | Ar with O2 Two way gas |
Ar Gas regulation range
| ≤50L/min |
O2 Gas regulation range
| ≤50SCCM |
| Pipeline specification |
| Pipeline speed |
0-100 - mm/s is adjustable
|
| Feed belt | 1.5M |
| The belt material | skid resistance PU |
| Induction and alarm |
| Sensing system | Card and lamination induction and emergency stop |
| | With sound and light alarm function |
2.2 Factory specifications
| Installation environment requirements |
| Demand for power supply | AC 220V/50Hz single phase 2.5KW |
Hvac, argon gas (Ar) | pressure: 0.3-0.8Mpa
flow: 15-50L/min
purity: 99.99% |
| The equipments of oxygen (O2) | pressure: 0.1-0.5Mpa
flow: 0-100mL/min
purity: 99.99% |
| Service clearance | 100cm |
2.3 General Requirements
| General Requirements |
| Risk identification | High pressure hazard identification |
| Service environment | temperature:15~30ºC
humidity:30~70% |
| Other matters needing attention | No combustible gases, corrosive gases, explosions or reactive dust |
| Configuration list |
| Serial number | Name | Model and specification | Quantity | Remark |
| 1 | Plasma power | 0-600W | 1 | |
| 2 |
Plasma matching unit
| matcher | 1 | |
| 3 | Assembly line |
Length 1800 mm * 520 mm wide
| 1 | |
| 4 | PLC | Panasonic PLC | 1 | |
| 5 | Low voltage appliances |
Conventional electrical appliance
| 1 | |
| 6 | Flowmeter | Ar And O2 | 2 | |
| 7 | Cooling-water machine | 450W,5-35ºC | 1 | |
| 8 |
Plasma head
| R500 | 1 | |
| Consumable materials list |
| Serial number | Name | Model and specification | Quantity | The life time |
| 1 | ceramic tub | ceramics | 1 | 4000-6000 hours |
| 2 | Chi plate | R500-02 | 1 | 6000-10000 hours |
| 3 | electrode | R500-01 | 1 | 15000 hours |
Equipment dimension drawings:
Product Tags:
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Wide Plasma Surface Processor Surface Activation Treatment Plasma cleaner Images
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